Speaker
Description
The Large Hadron Collider (LHC) will be upgraded to the High-Luminosity LHC (HL-LHC) by the end of this decade, with five times larger luminosity and 200 inelastic collisions per proton-proton bunch crossing. Thus, the ATLAS detector is challenged to survive the stronger radiation and the increased particle flux. As a result, the new ATLAS Inner Tracker (ITk) will replace the current one with a new full-silicon microstrip detector. The new silicon microstrip detector required high precision during manufacturing and thus a metrology process is necessary, in which an optical zoom microscope with precise position measurement is used, and a post process program was created to handle the measuring results. Validation and tests are done in Lund, Uppsala and Copenhagen.